| 薄膜成核过程的分子动力学模拟 |
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| 引用本文： | 和庆娣,周兰英. 薄膜成核过程的分子动力学模拟[J]. 机械, 2005, 0(Z1) |
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| 作者姓名： | 和庆娣 周兰英 |
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| 作者单位： | [1]北京理工大学机械与车辆工程学院 [2]北京理工大学机械与车辆工程学院 北京 |
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| 摘 要： | 用分子动力学的方法,在计算机上模拟了在具有不同偏斜度Sk的衬底上薄膜的成核过程,从理论上证明了偏斜度Sk取值在-1～-3时,薄膜的成核率高,从而有利于薄膜的生长。
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| 关 键 词： | 偏斜度 分子动力学 成核过程 计算机模拟 |
Molecular dynamics simulation in nucleus process of coating |
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| HE Qing-di,ZHOU Lan-ying. Molecular dynamics simulation in nucleus process of coating[J]. Machinery, 2005, 0(Z1) |
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| Authors: | HE Qing-di ZHOU Lan-ying |
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| Abstract: | The Nucleus circumstance of the coating on the substrate with different skewness of the profile (Sk) has been simulated by molecular dynamics method. It is proved that when the Sk is from -1 to -3, the Nucleus of thin films is higher. |
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| Keywords: | skewness of the profile (Sk) molecular dynamics Nucleus computer simulation |
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