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Enhanced elasticity in parylene thin films by copolymerization approach
Authors:Francesco Galeotti  Anita Andicsova  Fabio Bertini  Edith Laux  Lutz Hartmann  Olaf Khale  Hicham Damsir  William Porzio  Luc Stoppini  Herbert Keppner  Chiara Botta
Affiliation:1. CNR-Istituto per lo Studio delle Macromolecole, Via Bassini 15, 20133, Milan, Italy
6. Polymer Institute SAS, Dúbravská cesta 9, 84541, Bratislava 45, Slovakia
2. Institut des Microtechnologies Appliquees, HES-SO Arc, Eplatures-Grises 17, 2300, La Chaux-de Fonds, Switzerland
3. Fraunhofer Research Institution for Polymeric Materials and Composites PYCO, Kantstr. 55, 14513, Teltow, Germany
4. COMELEC SA, Rue de la Paix 129, 2301, La Chaux-de-Fonds, Switzerland
5. Hepia University of Applied Sciences Western Switzerland, Rue de la Prairie 4, 1202, Geneva, Switzerland
Abstract:The application of poly(p-xylylene)s as barrier and passivation layer is limited by the high tensile modulus of this class of materials. In this view, we propose a modified chemical vapor deposition approach to realize a series of copolymers based on parylene C, where linear alkyl chains partially replace the chlorides substituents. Thanks to the efficacious inclusion of bulky alkyl chains into the parylene layer, these modified materials show clear differences in both thermal and mechanical properties with respect to pristine parylene C. In particular, by following this approach, a decrease of the Young’s modulus up to 0.3 GPa (13 times reduction of parylene C modulus) is observed, indicating a neat enhancement of the elastic behavior. Besides the improved mechanical performance, the modified materials retain both barrier and biocompatibility properties typical of neat parylene C. The results presented support copolymerization as a valuable approach for tuning parylene properties, which enlarges further the field of application of this excellent multipurpose material.
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