| 以绝缘体上硅为基底的平面膜片钳电极的设计和制作 |
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| 引用本文： | 张振龙,刘向阳,毛艳丽. 以绝缘体上硅为基底的平面膜片钳电极的设计和制作[J]. 半导体学报, 2009, 30(9): 096001-4 |
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| 作者姓名： | 张振龙 刘向阳 毛艳丽 |
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| 摘 要： | The planar patch-clamp technique has been applied to high throughput screening in drug discovery. The key feature of this technique is the fabrication of a planar patch-clamp substrate using appropriate materials. In this study, a planar patch-clamp substrate was designed and fabricated using a silicon-on-insulator （SOI） wafer. The access resistance and capacitance of SOl-based planar patch-clamp substrates are smaller than those of bulk silicon-based planar substrates, which will reduce the distributed RC noise.
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| 关 键 词： | 膜片钳技术 绝缘体 平面 体硅 衬底 补丁 制造 设计 |
| 收稿时间： | 2009-03-01 |
| 修稿时间： | 2009-04-01 |
Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer |
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| Zhang Zhenlong,Liu Xiangyang and Mao Yanli. Design and fabrication of a planar patch-clamp substrate using a silicon-on-insulator wafer[J]. Chinese Journal of Semiconductors, 2009, 30(9): 096001-4 |
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| Authors: | Zhang Zhenlong Liu Xiangyang Mao Yanli |
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| Affiliation: | Institute of Optics and Photoelectronic Technology, School of Physics and Electronics, Henan University, Kaifeng 475004, China;Institute of Optics and Photoelectronic Technology, School of Physics and Electronics, Henan University, Kaifeng 475004, China;Institute of Optics and Photoelectronic Technology, School of Physics and Electronics, Henan University, Kaifeng 475004, China |
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| Abstract: | The planar patch-clamp technique has been applied to high throughput screening in drug discovery. The key feature of this technique is the fabrication of a planar patch-clamp substrate using appropriate materials. In this study, a planar patch-clamp substrate was designed and fabricated using a silicon-on-insulator (SOI) wafer. The access resistance and capacitance of SOI-based planar patch-clamp substrates are smaller than those of bulk silicon-based planar substrates, which will reduce the distributed RC noise. |
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| Keywords: | planar patch-clamp substrate silicon-on-insulator access resistance capacitance |
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