高钴硬质合金基体上生长金刚石薄膜组织结构及成分的研究

采用XRD, SEM, Raman 光谱仪等分析检测手段, 研究了YG₁₅ 硬质合金基体经表面二步法浸蚀后, 在其表面用热丝法沉积出的金刚石薄膜的晶体结构、组织及化学纯度等。结果表明:硬质合金基体表面一定深度范围内Co 含量的变化, 对金刚石薄膜的晶体结构取向、组织形态及化学纯度等有很大影响。CVD 沉积温度从900 ℃降至800 ℃, 后一温度下的金刚石薄膜的晶粒尺寸是前一温度下的1/5 。沉积温度降低至700 ℃左右时, 薄膜的金刚石纯度大大降低。

Study on the Morphology,Texture and Chemical Quality of Diamond Coatings on WC-15%Co

The morphology, texture and chemical quality of HF CVD diamond films on WC-15 %Co substrates which were pretreated by a two-step etching method were investigated by means of XRD, SEM and Raman spectrum.The results indicated that the Co contents within the etching depth of 5 μm had great affections on the texture transformation, morphology transformation and changes in chemical quality of the diamond films.The diamond film grain sizes became 5 times smaller when the deposition temperature was decreased from 900 ℃to 800 ℃.The chemical quality of diamond coatings was very poorwhen the deposition temperature below 700 ℃.