高成品率DFB激光二极管的设计及制备

设计并制作了一种新型分布反馈(DFB)光栅激光二极管结构.采用传输矩阵法模拟得到了不同光栅耦合因子、不同结构下随机相位对归一化阈值增益差和性能参数分布的影响;对高于阈值增益情况下激光二极管的特性进行了分析,结果表明随着激光二极管偏置电流的增加,光场平坦因子和归一化阈值增益差几乎保持不变,激光二极管单模稳定性好;模拟得到了光谱随偏置电流的变化,不同偏置电流下光谱的边模抑制比均大于40 dB.采用全息光刻技术结合普通光刻技术制备了新型DFB光栅.相比于均匀光栅激光二极管,新型DFB光栅激光二极管性能参数一致性更好、成品率更高,成品率达到80％以上.

Design and Fabrication of High Yield DFB Laser Diodes

A novel distributed feedback (DFB) grating laser diode structure was designed and fabricated.The influences of random phase on the normalized threshold gain margin and the performance parameter distribution with different grating coupling factors and different structures were simulated and obtained by transfer matrix method.In the case of above threshold gain,the characteristic of the laser diode was analyzed.The result shows that as the laser diode bias current increases,the flatness factor of optical field and the normalized threshold gain margin almost remain the same.Laser diode single-mode stability is good.The change of spectrum with bias current was simulated and obtained.The side-mode suppression ratios (SMSR) of spectrum with different bias currents are all more than 40 dB.The novel DFB grating was prepared by holographic lithography technology combined with general lithography technology.Compared with the uniform grating laser diode,the performance parameters of the novel DFB grating laser diode have better consistency and higher yield.The yield is more than 80％.