| 纳米晶WO_3电致变色特性(英文) |
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| 引用本文： | 俞军,施寒潇.纳米晶WO_3电致变色特性(英文)[J].功能材料与器件学报,2009,15(1). |
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| 作者姓名： | 俞军 施寒潇 |
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| 作者单位： | 浙江工商大学计算机与信息工程学院,杭州,310015 |
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| 摘 要： | 采用射频反应溅射制备了纳米晶WO3薄膜.基于Berg理论建立了WO3射频反应溅射模型,并分析工艺参数对滞回曲线的影响,基于研究了抽速、基片温度、馈入功率、靶片间距和溅射靶等离子体溅射面积的影响.提出了一种新的消除滞回曲线的制备纳米晶WO3薄膜的方法和优化的工艺参数.论文制备了性能良好的电致变色纳米晶WO3薄膜.分别用环境扫描电镜(ESEM)、X射线光电子能谱(XPS),X射线衍射(XRD)和分光光度计测试了该薄膜,该薄膜在可见光波段,不变色时的透光率大于95%,变色后为65%.纳米晶WO3薄膜的晶粒尺寸在40纳米左右,其高比表面积和缺陷态为电致变色的例子扩散提供了通道.
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| 关 键 词： | 电致变色 纳米晶 WO3薄膜 |
Electro-discoloring properties of nano crystal WO_3 thin films |
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| YU Jun,SHI Han-xiao.Electro-discoloring properties of nano crystal WO_3 thin films[J].Journal of Functional Materials and Devices,2009,15(1). |
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| Authors: | YU Jun SHI Han-xiao |
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| Affiliation: | Zhejiang Gongshang University;Computer and Information Engineering College;Hangzhou 310015;China |
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| Abstract: | Nanocrystalline WO3 thin films is prepared by RF reactive sputtering in this paper.Based on the analysis of the Berg hysteresis model,we analyze the process parameter influence on the hysteresis effect,inclusing pumping speed,temperature of substrate and target,input power,target to substrate distance and area of target.A new active feedback control method is present in this paper to eliminate hysteresis effect and depositing nanocrystalline WO3 thin films.Through measurement of its electro-discoloring prop... |
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| Keywords: | electro-discoloring nanocrystalline WO3 films |
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