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衬底温度对机械瓣膜上沉积的类金刚石薄膜的影响
引用本文:罗乐,蒋大鹏,赵读亮,严中亚,程光存,方晓东.衬底温度对机械瓣膜上沉积的类金刚石薄膜的影响[J].量子电子学报,2015,32(4):498-502.
作者姓名:罗乐  蒋大鹏  赵读亮  严中亚  程光存  方晓东
作者单位:1 合肥工业大学电子科学与应用物理学院,安徽 合肥;230009;2 安徽省立医院胸心外科;安徽 合肥,230001;3中国科学院安徽光学精密机械研究所,安徽 合肥,230031
基金项目:安徽省自然科学基金(1308085MF104)
摘    要:为掌握机械瓣膜衬底温度对类金刚石薄膜的影响规律,在实验中保持其它实验参数不变,机械瓣膜衬底温度分别取室温和150℃时,用脉冲激光沉积法在机械瓣膜上制备类金刚石薄膜。用Raman光谱仪对薄膜的微观结构进行检测;用原子力显微镜对薄膜的表面形貌和粗糙度进行检测。结果表明:当其它实验参数不变时,机械瓣膜衬底温度从室温升高到150℃时,薄膜的微观结构没有发生明显改变;薄膜表面的粗糙度减小。类金刚石薄膜和机械瓣膜衬底之间具有很好的黏附性。

关 键 词:材料  类金刚石薄膜  脉冲激光沉积法  衬底温度  微观结构  表面形貌
收稿时间:2014-09-12
修稿时间:2014-10-02

Influence of substrate temperature on diamond like carbon film on mechanical heart valve
LUO Le,JIANG Dapeng,ZHAO Duliang,YAN Zhongya,CHENG Guangcun,FANG Xiaodong.Influence of substrate temperature on diamond like carbon film on mechanical heart valve[J].Chinese Journal of Quantum Electronics,2015,32(4):498-502.
Authors:LUO Le  JIANG Dapeng  ZHAO Duliang  YAN Zhongya  CHENG Guangcun  FANG Xiaodong
Affiliation:1 Electronics and Applied Physics School, Hefei University of Technology, Hefei 230009, China;2 Department of Cardiac Surgery, Anhui Provincial Hospital, Hefei 230001, China
Abstract:In order to find out the rule for temperature of mechanical heart valves to influence diamond like carbon (DLC) film, the diamond like carbon films were deposited on mechanical heart valves by the pulsed laser deposition while the temperature of the mechanical heart valve kept chamber temperature and 150℃ respectively and other experimental conditions were kept unchangeable. The microstructure of the film was detected by the visible Raman spectroscopy. The topography and roughness of the film were detected by the atomic force microscopy (AFM). The experimental result demonstrates when the temperature of the mechanical heart valve increases from chamber temperature to 150℃, change of the film microstructure would not be obvious. The roughness of film surface would reduce. The diamond like carbon film would exhibit strong adhesion to mechanical heart valve.
Keywords:materials  diamond like carbon film  pulsed laser deposition  substrate temperature  microstructure  topography
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