In situ optical characterization and reengineering of interference coatings |
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| Authors: | Wilbrandt Steffen Stenzel Olaf Kaiser Norbert Trubetskov Michael K Tikhonravov Alexander V |
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| Affiliation: | Fraunhofer Institute of Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, D-07745 Jena, Germany. steffen.wilbrandt@iof.fraunhofer.de |
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| Abstract: | A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings. |
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