Ultra-high voltage electron microscopy: Past,present, and future

High voltage electron microscopy has shown numerous advantages for the study of natural science, including biology, but it is especially useful in materials science. The most important advantage for materials science is in-situ experiments on detailed processes of the same phenomena that occur in bulk materials. For such in-situ experiments, the specimens should be thicker than a few microns to observe the behavior of lattice effect. The maximum observable thickness of the specimens and other advantages markedly increase with increasing accelerating voltage, and since 1965, two 3 MV instruments have been installed. The present paper is mainly concerned with these 3 MV electron microscopes and their applications to new research fields.