| Abstract: | A second-generation capped deep-UV portable conformable masking system Is described. Two major improvements of this system are; (1) The replacement of the PMMA bottom layer with the PMMA-MA-MAN terpolymer which has a higher thermal stability and a higher deep-UV sensitivity. (2) The application of the mold hardening process to eliminate the “wings” protruding from the novolac-terpolymer interface, to facilitate a better choice of developers for the bottom layer, and to provide a better refractive index match between the novolac image lines. |
