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Measurement and calibration for Stewart micromanipulation system
Authors:Yung Ting  Ho-Chin Jar  Chun-Chung Li
Affiliation:aDepartment of Mechanical Engineering, Chung Yuan Christian University, No. 200, Chung Pei Rd., Chung Li 32023, Taiwan, ROC
Abstract:In this article, hysteresis controller design and static error compensation method for a 6-dof micro-positioning platform driven by piezoelectric actuator is studied. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of Preisach model. Its inverse model is used as the feedforward controller. Error compensation method is designed to compensate manufacture error and assembly error by use of the developed 3-points-3-axes measurement method. From practical experiment, the proposed method makes improvement on the accuracy of positioning.
Keywords:Piezoelectric actuators  6-dof platform  Hysteresis modeling  Error compensation
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