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激光诱导六甲基乙硅胺烷气相合成Si/N/C纳米粉末的制备与表征研究
引用本文:李亚利,梁勇.激光诱导六甲基乙硅胺烷气相合成Si/N/C纳米粉末的制备与表征研究[J].硅酸盐学报,1995,23(1):102-105.
作者姓名:李亚利  梁勇
作者单位:中国科学院金属研究所快速凝固非平衡合金国家实验室
摘    要:选择廉价的六甲基乙硅胺烷-(Me3Si)2NH和氮气为原料进行激光诱导气相反应,通过交变化激光功率密度及反应气流量,制备具有较宽组分变化范围的Si/N/C纳米粉。用化学分析,TEM,SAXS,BET,IR,XRD等测试手段对粉末进行了表征,结果表明此Si/N/C粉主要由Si-N和Si-C键构成,是Si,N,C组成的无定型物,由于实验条件的不同会不同程序地导粉末中存有有机杂质。

关 键 词:六甲基  乙硅胺烷  陶瓷粉末  纳米级  气相合成

SYNTHESIS AND CHARACTERIZATION OF Si/N/C NANOPOWDER FROM HEXAMETHYLDISILAZANE BY LASER INDUCED GAS PHASE REACTION
Li Yali,Liang Yong,Zheng Feng,Hu Zhuangqi.SYNTHESIS AND CHARACTERIZATION OF Si/N/C NANOPOWDER FROM HEXAMETHYLDISILAZANE BY LASER INDUCED GAS PHASE REACTION[J].Journal of The Chinese Ceramic Society,1995,23(1):102-105.
Authors:Li Yali  Liang Yong  Zheng Feng  Hu Zhuangqi
Abstract:The Si/N/C nanopowder with a wide composition range was synthesized from hexamethyldisilazane and ammonia by laser induced gas phase reactions under the orthogonal design of laser power density and two reactant flow rates. The powder produced was characterized by chemical analysis,TEM,SAXS,IR and XRD. The Si/N/C powder is an amorphous compound consisted mainly of Si-N and Si-C bonds and some organic substances which depends on the synthesis processing parameters.
Keywords:laser synthesis  hexamethyldisilazane  nanopowder  silica  nitrogen  carbon
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