Orientation of the BSCCO films prepared by low-pressure single-aerosol source metallorganic chemical vapour deposition |
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Authors: | V. N. Fuflyigin A. R. Kaul S. A. Pozigun L. Klippe G. Wahl |
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Affiliation: | (1) Department of Chemistry, Moscow State University, Vorobievyi Goryi, 119899 Moscow, Russia;(2) IOPW, Technische Universitüt Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany |
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Abstract: | Thin films (0.7–0.8 μm) of Bi2Sr2CaCu2Ox were deposited by low-pressure metallorganic chemical vapour deposition with a single aerosol source. The influence of the deposition parameters on the orientation of the films was studied. It was established that low deposition rate, high deposition temperature and the presence of the liquid phase resulted in films with predominant c-orientation. |
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