| 金刚石薄膜制备和评价 |
| |
| 引用本文： | 邱万奇,刘正义,陈剑惠,刘志唐,周克崧,代明江,王德政,丁谦. 金刚石薄膜制备和评价[J]. 理化检验(物理分册), 1998, 34(6): 14-16,36 |
| |
| 作者姓名： | 邱万奇 刘正义 陈剑惠 刘志唐 周克崧 代明江 王德政 丁谦 |
| |
| 作者单位： | 华南理工大学 广州510641(邱万奇，刘正义，陈剑惠，刘志唐)，广州有色金属研究院 广州510651(周克崧，代明江，王德政，丁谦) |
| |
| 基金项目： | 广东省自然科学基金 B6-102-234 |
| |
| 摘 要： | 采用平直钨丝作热解源,并借助钨丝支架的弹性恢复力,较好地解决了热丝热解化学气相沉积法(HFCVD)合成金刚石过程中热解丝的变形问题.样品独立加热,基片温度、钨丝温度、钨丝与样品基片距离均可独立调节.装置改进后,在Si(100)上合成了面积大约45mm×25mm的比较均匀的金刚石膜.用扫描电子显微镜(SEM)、Raman光谱和X射线衍射仪对制备的金刚石膜进行了分析.
|
| 关 键 词： | 金刚石薄膜 合成 热丝 HFCVD 薄膜制备 |
SYNTHESIS AND EVALUATION OF HIGH-PERFORMANCE DIAMOND FILMS |
| |
| Qiu Wanqi Liu Zhengyi Chen Jianhui Liu ZhitangSouth China University of TechnologyZhou Kesong Dai Mingjiang Wang Dezheng Ding QianGuangzhou Research Institute of Non-ferrous Metals. SYNTHESIS AND EVALUATION OF HIGH-PERFORMANCE DIAMOND FILMS[J]. Physical Testing and Chemical Analysis Part A:Physical Testing, 1998, 34(6): 14-16,36 |
| |
| Authors: | Qiu Wanqi Liu Zhengyi Chen Jianhui Liu ZhitangSouth China University of TechnologyZhou Kesong Dai Mingjiang Wang Dezheng Ding QianGuangzhou Research Institute of Non-ferrous Metals |
| |
| Affiliation: | Qiu Wanqi Liu Zhengyi Chen Jianhui Liu ZhitangSouth China University of TechnologyZhou Kesong Dai Mingjiang Wang Dezheng Ding QianGuangzhou Research Institute of Non-ferrous Metals |
| |
| Abstract: | |
| |
| Keywords: | Diamond Big area Hot-filament |
| 本文献已被 CNKI 等数据库收录！ |
