| 类金刚石碳膜的复合硬度与本征硬度的研究 |
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| 引用本文： | 匡同春,刘正义.类金刚石碳膜的复合硬度与本征硬度的研究[J].理化检验(物理分册),1998,34(2):5-9. |
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| 作者姓名： | 匡同春 刘正义 |
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| 作者单位： | 广东工业大学 广州510090(匡同春)，华南理工大学 广州510641(刘正义) |
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| 摘 要： | 在综述现有的测量薄膜（涂层）材料本征硬度方法及模型的基础上，采用超显微硬度仪对不同基体经不同工艺条件沉积的类金刚石碳昨合硬度进行了测量，并借助有限元模型得到的经验公式对测量数据进行拟合处理，得出了各种类金刚石碳膜的本征硬度。硬质合金基体上类金刚石膜本度为０２ＧＰａ，硅基体上经不同工艺条件沉积的类金刚石碳膜本征硬度在２０－３０ＧＰａ范围。在对膜／基得合体系进行Ｍｅｙｅｒ定律修正的基础上，首次提出了一
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| 关 键 词： | 类金刚石碳膜 复合硬度 本征硬度 薄膜 涂层 |
THE COMPOSITE AND INTRINSIC HARDNESS OF DIAMOND-LIKE CARBON FILMS |
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| Kuang Tongchun.THE COMPOSITE AND INTRINSIC HARDNESS OF DIAMOND-LIKE CARBON FILMS[J].Physical Testing and Chemical Analysis Part A:Physical Testing,1998,34(2):5-9. |
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| Authors: | Kuang Tongchun |
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| Affiliation: | Kuang Tongchun (GuangDong University of Technology) Liu Zhengyi (South China University of Technology) |
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| Abstract: | The composite hardness of DLC (Diamond-Like Carbon) films deposited on different substrates under various process conditions has been measured by using microhardness tester on the basis of reviewing the methods and models available to evaluate the hardness of thin film or coating materials. The intrinsic hardness of various DLC films has been obtained through fit treatments of measured date by means of the empirical equation derived from FEM (Finite Element Model), The intrinsic hardness of DLC film/cemented carbide composite system is about 20GPa, the intrinsic hardness of DLC films deposited on silicon substrates under various process parameters is between 20~30GPa. A simple technique to obtain the intrinsic hardness of DLC films has been firstly proposed on the basis of using the Meyer law to modify the film/substrate composite system. |
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| Keywords: | DLC film Composite hardness Intrinsic hardness |
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