Independently addressable VCSEL arrays on 3-μm pitch

We present an exceedingly dense linear vertical-cavity surface-emitting laser (VCSEL) array with independently addressable elements on a staggered 3-μm pitch. Our devices utilize an all-epitaxial structure and operate at a wavelength of 813 mm with threshold currents below 400 μA. The high-packing density is enabled by combining transparent contact technology with a planar laterally oxidized device architecture. The array exhibits low interelement thermal crosstalk and has electrical resistances of 3 MΩ between adjacent array elements