石英挠性加速度计的压膜阻尼分析

石英挠性加速度计是导航与制导系统中常用的一种惯性元件,其表头阻尼影响加速度计的动态性能但相关研究却鲜有报道,基于此提出一种适用于石英挠性加速度计的压膜阻尼分析方法。根据石英摆片的形状和转动规律建立雷诺方程,采用时域有限差分方法在摆片上的非规则区域内求解压强分布和阻尼力矩,进而得到阻尼系数为1.69×10-4Nms/rad,对应阻尼比为12.75。计算阻尼比与系统参数辨识实验得到的阻尼比11.57相近,证明提出的压膜阻尼分析方法有效可行,该方法可以为石英挠性加速度计及类似惯性传感器中的阻尼分析与设计提供指导。

Analysis of squeeze film damping in quartz flexible accelerometer

Quartz flexible accelerometers (QFAs) are a type of widely used inertial sensors in navigation and guidance systems, and the damping in sensor head influences the dynamic performance, but the relative researches have rarely been reported. A squeeze film damping analyzing method suitable for QFAs is proposed in this paper. A Reynolds equation is established according to the shape and rotation principle of the silicon pendulous reed, and then the equation is solved through the finite difference time domain (FDTD) method in the irregular region of the pendulous reed. The damping coefficient is calculated as 1.69×10-4 Nms/rad, and the corresponding damping ratio reaches 12.75, which approximates the damping ratio 11.57 obtained by parameter identification experiment. The feasibility of the proposed method can be validated by this comparison, and the method can supply guidance for the damping analysis and design in QFAs and other similar inertial sensors.