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Improvement of diamond X-ray mask membrane: Optical transmittance, surface roughness and irradiation durability |
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| Authors: | Shinji Tsuboi Nobufumi Atoda Yoshio Yamashita Kinya Ashikaga Isao Yamada and Jiro Matsuo |
| Affiliation: | a SORTEC Corporation, 16-1 Wadai, Tsukuba-shi, Ibaraki 300-42, Japan b Ion Beam Engineering Experimental Laboratory, Faculty of Engineering, Kyoto University, Yoshidahon-machi, Sakyo-ku, Kyoto 606-01, Japan |
| Abstract: | A viable method for the improvement of the polycrystalline diamond X-ray mask membrane is proposed. The use of an ionized cluster beam yields the smoothest surface. Sol-gel planarization film coating with indium tin oxide is the most effective method for obtaining high optical transmittance without sacrificing high synchrotron irradiation durability. |
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