A magnetometer of weak quasi-stationary and high-frequency fields on resonator microstrip transducers with thin magnetic fields

A high-sensitivity magnetometer for simultaneous measurements of three components of a weak quasi-stationary or high-frequency magnetic-field vector was developed and investigated. Microstrip structures that are based on irregular resonators serve as the magnetometer transducers. An anisotropic thin-film magnetic structure is used as the sensing element. This structure consists of two thin magnetic films that are prepared by magnetron sputtering of a Ni₇₅Fe₂₅ permalloy target and separated by a silicon monoxide layer. It is demonstrated that the transducer exhibits the maximum sensitivity, when the easy magnetization axis of the film structure is orthogonal to the polarization direction of the pumping microwave magnetic field in the microstrip resonator and at an optimal value of a constant magnetic bias field and its optimal deflection from the pumping-field polarization direction which is parallel to it. The magnetometer is characterized by a wide dynamic range of measured magnetic fields, 10^–10–10^–4 Т, and a wide frequency range, 10^–1–10⁵ Hz.