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Microstructure Tailoring for High Thermal Conductivity of β-Si3N4 Ceramics
Authors:Hiroshi Yokota  Masahiro Ibukiyama
Affiliation:Research Center, Denki Kagaku Kogyo K.K., 3-5-1 Asahi-cho, Machida-City, 194-8560 Tokyo, Japan
Abstract:β-Si3N4 ceramics sintered with Yb2O3 and ZrO2 were fabricated by gas-pressure sintering at 1950°C for 16 h changing the ratio of "fine" and "coarse" high-purity β-Si3N4 raw powders, and their microstructures were quantitatively evaluated. It was found that the amount of large grains (greater than a few tens of micrometers) could be drastically reduced by mixing a small amount of "coarse" powder with a "fine" one, while maintaining high thermal conductivity (>140 W·(m·K)?1). Thus, this work demonstrates that it is possible for β-Si3N4 ceramics to achieve high thermal conductivity and high strength simultaneously by optimizing the particle size distribution of raw powder.
Keywords:microstructure  thermal conductivity  silicon nitride
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