Transparent flexible plastic substrates for organic light-emitting devices

In this paper, we describe the properties of flexible plastic substrates with a transparent conducting electrode (TCE), which are important for organic light-emitting devices (OLEDs). Specifically, we have evaluated the TCE electrical resistivity, surface roughness, electrode patterning, optical transmission, and the substrate water vapor/oxygen transmission. We have studied the effect of ultraviolet (UV)-ozone treatment on the TCE surface by using contact angle measurements and x-ray photoelectron spectroscopy (XPS). A decrease in the advancing contact angle by 30–40° and an increase of oxygen content on the TCE surface by 10 at.% were observed after the UV-ozone treatment. These changes facilitate the polymer adhesion to the TCE surface and increase the TCE surface work function, respectively. A sheet resistance of 12–13 Ω/□, an optical transmission greater than 80% over the visible range, and a surface roughness of 1.4–2.2-nm RMS over 50×50 μm² have been obtained for the plastic substrates. These properties are adequate for OLED applications based on United States Display Consortium specifications. Finally, we have found that a combination of hydrogenated amorphous silicon-nitride and silicon-oxide layers deposited on one side of the substrate at low-temperature reduces the water vapor and oxygen transmission rates (TRs) to less than 10⁻⁵ g/cm²-day-atm and about 10⁻⁷ cc/cm²-day-atm, respectively.