Micro-patterning on non-planar surface using flexible microstencil

A method for fabrication of flexible stencil was studied. Flexibility of the stencil allows micropatterning on a curved surface by material deposition or material removal (etching) through patterned hole of the stencil. In this study, low mechanical stability of the thin stencil membrane was improved by bonding the membrane with rim supporter which is thick and strong enough for easy handling of the stencil. Both of the membrane and rim structure were made of elastomer, PDMS using molding process from SU-8 master mold. The application test of shadow deposition and etching on underlying nonplanar surface using the fabricated flexible stencil mask showed the feasibility of the suggested technique into micro- patterning on a curved surface.