Polyimide/Ta2O5/polyimide antiresonantreflecting optical waveguides |
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Authors: | Chu AK Chuang MJ |
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Affiliation: | Inst. of Electro-Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung; |
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Abstract: | A novel antiresonant reflecting optical waveguide (ARROW) fabricated using both the organic and dielectric thin film technologies is presented for the first time. The ARROW consisted of the fluorinated polyimide and tantalum pentoxide (Ta2O5) hybrid layers deposited on a Si substrate. For TE polarized light, the propagation loss of the waveguide as low as 0.8 dB/cm is obtained at 632.8 nm. The propagation loss for TM polarized light is 2.7 dB/cm. Some design considerations of the hybrid ARROW are also discussed in this work |
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