数控机床误差测量技术及其误差补偿

介绍了一种使用激光多普勒位移干涉仪对数控机床误差测量和误差补偿的方法。分轴步进体对角线测量法就是通过序列的单轴运动使机床沿着体对角线运动，这样便可以分离出数控机床的各项空间误差元素，包括直线定位误差、垂直直线度误差、水平直线度误差。然后利用测量误差自动生成补偿文件，输入数控系统，对误差进行相应的补偿。实验证明了这种测量和补偿的有效性。

Research on the Technology of Error Measurement and Compensation for CNC Machine Tools

An effective technique of measurement and error compensation of the CNC-machine tools using laser doppler displacement meter（LDDM） are introduced in this paper. The laser step diagonal measurement modifies the diagonal displacement measurement by executing a diagonal as a sequence of single-axis motions. It has been claimed that it enables the identification of all the volumetric error components including linear errors, straightness and squareness errors. Then the LDDM software can automatically generate compensation document according measured datas. Then we can put this compensation document into CNC-system and it can compensate the errors. The effectiveness of the proposed modified identification scheme is investigated by an experiment.