| 用辉光放电光谱技术分析稀土离子氮化层中的元素 |
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| 引用本文： | 张津. 用辉光放电光谱技术分析稀土离子氮化层中的元素[J]. 理化检验(物理分册), 1999, 35(11): 499-500 |
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| 作者姓名： | 张津 |
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| 作者单位： | 重庆大学机械传动国家重点实验室!重庆400044 |
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| 摘 要： | 介绍了辉光放电光谱技术的原理及与其它表面分析技术的比较。用此技术成功快速地测得氮化表层的稀土和氮、碳、氧沿氮化层分布，并由此推出经合物层深。
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| 关 键 词： | 辉光放电 离子氮化 元素分析 表面分析 |
ANALYSIS OF ELEMENTS IN THE RARE EARTH PLASMA NITRIDED LAYER BY GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY |
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| Zhang Jin. ANALYSIS OF ELEMENTS IN THE RARE EARTH PLASMA NITRIDED LAYER BY GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY[J]. Physical Testing and Chemical Analysis Part A:Physical Testing, 1999, 35(11): 499-500 |
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| Authors: | Zhang Jin |
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| Abstract: | The principle of glow discharge optical emission spectrometry was introduced in this paper, and was compared with other surface analysis techniques. The distribution of rare earth, nitrogen, carbon, oxygen and other elements along the nitride layer were measured by GDOES. The depth of compound layer could be estimat-ed. |
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| Keywords: | Glow discharge Plasma nitride Element |
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