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超声波扫描显微镜应用及发展研究
引用本文:高媛,杨敬,李立,胡志臣.超声波扫描显微镜应用及发展研究[J].计算机测量与控制,2023,31(8):1-9.
作者姓名:高媛  杨敬  李立  胡志臣
作者单位:装备发展部某中心,北京航天测控技术有限公司,,
摘    要:超声波扫描显微镜是一种利用超声波为传播媒介的无损检测成像设备,相对于传统的破坏性检测,超声显微镜不会对样品造成损伤,更不会影响样品的性能。本文主要介绍了超声波显微镜的发展现状、应用领域和发展等内容。应用领域主要从材料科学检测行业、半导体测试行业、金刚石检测行业、低压电器检测行业和水冷板检测行业。最后,对超声波扫描显微镜的发展进行了展望。随着超声波技术的发展,声频会越来越高,超声显微镜的本领将越来越大。可以预料,它与其他尖端技术结合,将会发挥出更大更独特的作用。

关 键 词:超声波扫描显微镜  半导体测试  超声波  探头
收稿时间:2023/6/5 0:00:00
修稿时间:2023/6/9 0:00:00

Application and Development of Scanning Acoustic Microscope
Abstract:Scanning acoustic microscope is a kind of non-destructive testing imaging equipment using ultrasonic wave as the media. Compared with traditional destructive testing, scanning acoustic microscope will not cause damage to the sample, let alone affect the performance of the sample. This paper mainly introduces the development status, application and development of scanning acoustic microscope. Application fields are mainly from the material science testing industry, semiconductor testing industry, diamond testing industry, low-voltage electrical testing industry and water cooling plate testing industry. Finally, the development of scanning acoustic microscope is prospected. With the development of ultrasonic technology, the frequency of sound will be higher and higher, and the power of ultrasonic microscope will be larger and larger. It can be expected that it will play a bigger and more unique role when combined with other cutting-edge technologies.
Keywords:scanning acoustic microscope  semiconductor testing  ultrasonic  sensor
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