| 微晶硅材料和电池特性的相关研究 |
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| 引用本文： | 张晓丹,赵颖,魏长春,孙建,赵静,耿新华,熊绍珍.微晶硅材料和电池特性的相关研究[J].太阳能学报,2007,28(12):1304-1307. |
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| 作者姓名： | 张晓丹 赵颖 魏长春 孙建 赵静 耿新华 熊绍珍 |
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| 作者单位： | 1. 南开大学光电子薄膜器件与技术研究所,天津,300071;南开大学光电子薄膜器件与技术天津市重点实验室,天津,300071;光电信息技术科学教育部重点实验室(南开大学,天津大学)天津,300071
2. 天津新华职工大学,天津,300040 |
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| 基金项目： | 国家重点基础研究发展计划(973计划);国家自然科学基金;南开大学校科研和教改项目;科技部国际科技合作项目;国家重点基础研究发展计划(973计划);教育部新世纪优秀人才培养计划 |
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| 摘 要： | 主要采用甚高频等离子体增强化学气相沉积技术制备了系列微晶硅材料和电池。通过对材料电学特性、结构特性和电池间性能关系的研究,获得了高效率微晶硅薄膜太阳电池所对应材料的基本特性:暗电导在10~(-8)s/cm量级上,光敏性大于1000,晶化率约50%。进行了制备电池的开路电压和表观带隙之间关系的研究。
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| 关 键 词： | 甚高频等离子体增强化学气相沉积 高效率微晶硅薄膜太阳电池 表观带隙 |
| 文章编号： | 0254-0096（2007）12-1304-04 |
| 收稿时间： | 2006-08-23 |
| 修稿时间： | 2006年8月23日 |
STUDY OF RELATIONSHIP BETWEEN MICROCRYSTALLINE SILICON THIN FILM AND SOLAR CELLS |
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| Zhang Xiaodan,Zhao Ying,Wei Changchu,Sun Jian,Zhao Jing,Geng Xinhua,Xiong Shaozhen.STUDY OF RELATIONSHIP BETWEEN MICROCRYSTALLINE SILICON THIN FILM AND SOLAR CELLS[J].Acta Energiae Solaris Sinica,2007,28(12):1304-1307. |
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| Authors: | Zhang Xiaodan Zhao Ying Wei Changchu Sun Jian Zhao Jing Geng Xinhua Xiong Shaozhen |
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| Abstract: | Series of microcrystalline silicon thin films and solar cells were fabricated by very high frequency plasma en- hanced chemical vapor deposition.Through studying the relationship between electrical and structural properties of micro- crystalline silicon thin films performances of microcrystalline silicon solar ceils,it can be concluded that microcrystalline silicon thin films incorporated into microcrystaUine silicon solar cells with high conversion efficiency should have the fol- lowing conditions:dark conductivity was in the order of 10~(-8)s/cm,photosensitivity was larger than 1000 and crystalline fraction was about 50 %.At the same time,the relationship between open circuit voltage of solar cells apparent band-gap was also studied. |
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| Keywords: | very high frequency plasma enhanced chemical vapor deposition high efficiency microcrystaUine silicon solar cells apparent band-gap |
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