微型高过载加速度传感器的加工与测试

针对特殊场合的测试要求，设计了四端全固支的高过载梁岛结构加速度传感器，结构中采用在质量块背部氢氧化钾腐蚀的方法，减小质量块的质量，及其与梁中性面的相对距离，使梁岛式结构与平膜式结构的优点得到有效结合，结构加工工艺简单可行。利用霍普金森冲击校准装置进行冲击加速度动态特性校准,试验结果分析表明，被测微加速度传感器的灵敏度为0.71 µV/g，与理论值基本吻合。结构受到200 000g冲击后完好且输出信号正常，能有效地满足高冲击、强烈振动场合的特殊测试要求。

Fabrication and Test of Micro High Overloading Acceleration Sensor

Aiming at testing in special situation, a high-overload piezoresistive acceleration sensor with four-end fixed beam-island structure is designed. The mass of the tower and the distance between the center of tower and beam is decreased by KOH etch at the back of the mass, which combines the merits of beam-island structure and beam structure. The processing technique is simple and feasible. Hopkinson impact equipment is used to calibrate the dynamic characteristic of impact acceleration. The test result indicates that the sensitivity of the micro acceleration sensor is 0.71μV/g, basically tallying with the theoretical value. The output signal is still normal when the structure has suffered an impact of 200 000g，so it can satisfy the special test requirements in a high impact and intense vibration environment.