| MEMS技术现状及应用 |
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| 引用本文： | 杨友文,王建华. MEMS技术现状及应用[J]. 微纳电子技术, 2003, 40(3): 29-32 |
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| 作者姓名： | 杨友文 王建华 |
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| 作者单位： | 合肥工业大学科研处,安徽,合肥,230009 |
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| 摘 要： | 微机电系统(MEMS)技术是一门新兴的技术,它将微电子技术和精密机械加工技术融合在一起,实现了微电子与机械的融为一体。近年来,对MEMS的技术发展、加工工艺及其产业化的研究也被越来越多的人所重视。文章介绍了MEMS的特点与技术发展现状、MEMS器件的类型及其功能,并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
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| 关 键 词： | 微机电系统 发展 磁微执行器 |
| 文章编号： | 1671-4776(2003)03-0029-04 |
| 修稿时间： | 2002-11-29 |
The status and application of MEMS technology |
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| YANG You-wen,WANG Jian-hua. The status and application of MEMS technology[J]. Micronanoelectronic Technology, 2003, 40(3): 29-32 |
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| Authors: | YANG You-wen WANG Jian-hua |
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| Abstract: | MEMS technology is a new emerging technology, which introjects the microelectronic technology and the precision machine machining technology. In recent years, more and more people concentrate on the technology, fabrication craft and industrialization of the MEMS. In this paper, the feature and the development trend of the MEMS technology are introduced. The operational principles and the fabrication craft of the magnetic micro-actuator with a multilevel meander are discussed also. |
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| Keywords: | MEMS development magnetic micro-actuator |
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