| 相移干涉计量中高精度相移器的研究 |
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| 引用本文： | 范华,张弛,任亚萍,谭玉山. 相移干涉计量中高精度相移器的研究[J]. 中国激光, 1999, 26(1): 21-25 |
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| 作者姓名： | 范华 张弛 任亚萍 谭玉山 |
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| 作者单位： | 西安交通大学激光红外研究所 |
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| 摘 要： | 相移器是相移干涉计量中的关键技术，对测量精度有很大的影响，关系到相移技术的成败。介绍了一种闭环控制的高精度相移器，输出电压精度为０．１％，相移器重复误差小于３°，用该相移器的电子散斑干涉计量系统测量精度可达λ／１００。
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| 关 键 词： | 电子散斑，相移器，干涉计量 |
| 收稿时间： | 1997-07-30 |
Study of a High Precision Phase Shifter Employed in Phase Shifting Metrology |
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| Fan Hua,Zhang Chi,Ren Yaping,Tan Yushan. Study of a High Precision Phase Shifter Employed in Phase Shifting Metrology[J]. Chinese Journal of Lasers, 1999, 26(1): 21-25 |
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| Authors: | Fan Hua Zhang Chi Ren Yaping Tan Yushan |
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| Abstract: | Phase shifting is the key technique in phase shifting interference metrology and it greatly effects the measuring precision even results in a failure. A high precision phase shifter is presented in this paper. The error of the output voltage is less than 0.1% and the error of the phase shifter is less than 3 degrees. The ESPI measuring system with the phase shifter described in this paper can reach a precision of λ/100. |
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| Keywords: | electronic speckle pattern interferometry (ESPI) phase shifter interference metrology |
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