| 真空微电子二极管及微位移传感器的研究 |
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| 引用本文： | 朱长纯,王海笑,刘君华,关辉,李毓民.真空微电子二极管及微位移传感器的研究[J].广东有色金属学报,1993(2). |
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| 作者姓名： | 朱长纯 王海笑 刘君华 关辉 李毓民 |
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| 作者单位： | 西安交通大学 710049(朱长纯，王海笑，刘君华，关辉)，北京电子管厂 100016(李毓民) |
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| 摘 要： | 首次用电荷模拟法计算了真空微电子二极管及真空微电子微位移传感器的场致发射阴极与阳极问的电场分布,进而计算了真空微电子二极管的电流一电压特性和微位移传感器的电流—位移(即阴、阳极间距)的关系曲线。模拟了两种结构的场致发射阴极:圆锥形和劈形。并用测试精度可达4 nm的水槽法模拟实验对计算结果进行了验证,理论计算与实验结果符合地很好。
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| 关 键 词： | 微位移传感器 电荷模拟法 电场分布计算 场致发射阴极 真空微电子器件 |
Study of Microvacuum Diode and Displacement Transducer |
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| Zhu Changchun Wang Haixiao Liu Junhua Guan Hui Li Uumin.Study of Microvacuum Diode and Displacement Transducer[J].Journal of Guangdong Non-Ferrous Metals,1993(2). |
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| Authors: | Zhu Changchun Wang Haixiao Liu Junhua Guan Hui Li Uumin |
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| Abstract: | The charge simulation method is employed to compute the field distribution in a novel compact displacement transducer. Both cone-shape and wedge-shape field emitter cathodes are studied. I-V curve and I-Displacement curve are calculated. For comparison, a water trough method is used to find field distribution,and the result is well in agreement with the calculations. |
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| Keywords: | microvacuum displacement transducer charge simulation method calculations of field distribution microvacuum divice |
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