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分子束外延生长Al_xGa_(1-x)As/GaAs超晶格及结构、光学特性研究
引用本文:张允强,高翔,彭正夫,孙娟,蒋树声,章灵军. 分子束外延生长Al_xGa_(1-x)As/GaAs超晶格及结构、光学特性研究[J]. 固体电子学研究与进展, 1993, 0(1)
作者姓名:张允强  高翔  彭正夫  孙娟  蒋树声  章灵军
作者单位:南京电子器件研究所 210016(张允强,高翔,彭正夫,孙娟),南京大学固体微结构实验室 210008(蒋树声),上海红外物理国家实验室 200083(章灵军)
摘    要:报道了分子束外延生长80个周期的Al_xGa_(1-x)As/GaAs超晶格,X射线衍射和透射电镜的结果表明超晶格样品有良好的结构特性,光反射光谱观察到阱内的电子跃迁过程,其结果与理论计算相符。

关 键 词:分子束外延  超晶格  X射线衍射  光调制反射光谱

Study on the Structural and Optical Properties of Al_xGa_(1-x)As/GaAs Superlattice Grown by Molecular Beam Epitaxy
Zhang Yunqiang,Gao Xiang,Peng Zenfu,Sun Juan. Study on the Structural and Optical Properties of Al_xGa_(1-x)As/GaAs Superlattice Grown by Molecular Beam Epitaxy[J]. Research & Progress of Solid State Electronics, 1993, 0(1)
Authors:Zhang Yunqiang  Gao Xiang  Peng Zenfu  Sun Juan
Abstract:An AlxGa1-xAs/GaAs superlattice with 80 periods was grown by molecular beam epitaxy. Results of X-ray diffraction and TEM indicate that the superlattice sample has good structural property. The electron transition process in quantum well is observed by modulated photo-reflection spectrum and agrees with the theoritical calculation.
Keywords:Molecular Beam Epitaxy   Superlattices   X-ray Diffraction   Modulated Photo-reflection Spectrum
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