Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch |
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| Authors: | Chu PB Brener I Chuan Pu Shi-Sheng Lee Dadap JI Sangtae Park Bergman K Bonadeo NH Chau T Ming Chou Doran RA Gibson R Harel R Johnson JJ Lee CD Peale DR Bo Tang Tong DTK Ming-Ju Tsai Qi Wu Zhong W Goldstein EL Lin LY Walker JA |
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| Affiliation: | Seagate Technol., Pittsburgh, PA, USA; |
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| Abstract: | In this paper, we demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in an optical cross-connect. We show switching times of less than 10 ms and optical power stability of better than 0.2 dB. The mirrors, made from 10-/spl mu/m-thick single-crystal silicon and with a radius of 400-450 /spl mu/m, are able to tilt to 8/spl deg/ corresponding to 80% of touchdown angle. This is achieved using a nonlinear closed-loop control algorithm, which also results in a maximum actuation voltage of 85 V, and a pointing accuracy of less than 150 /spl mu/rad. This paper will describe the MEMS mirror and actuator design, modeling, servo design, and measurement results. |
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