Ge/Si waveguide photodiodes with built-in layers of Ge quantum dots for fiber-optic communication lines

The results of research aimed at the development of high-efficiency Ge/Si-based photodetectors for fiber-optic communication applications are reported. The photodetectors are designed as vertical p-i-n diodes on silicon-on-insulator substrates in combination with waveguide lateral geometry and contain Ge quantum-dot layers. The layer density of quantum dots is 1×10¹² cm^?2; the dot size in the plane of growth is ～8 nm. Unprecedentedly high quantum efficiency suitable for the range of telecommunication wavelengths is attained; specifically, in the waveguides illuminated from the end side, the efficiency was as high as 21 and 16% at 1.3 and 1.55 µm, respectively.