Abstract: | Two types of GaAs/AlGaAs quantum dot arrays with different dot size are fabricated by dry etching and dry|wet etching. PL spectra of the quantum dot arrays at low temperature show the blue shifts due to the quantization confinement effects, and the blue|shift increases with the decrease of the dot size. It is also found that wet chemical etching can reduce the surface damage caused by high|energy ion etching and improve the optical characteristics of the quantum dot arrays. |