| MEMS尺寸效应的分析模型及应用 |
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| 引用本文： | 韩光平,刘凯,褚金奎. MEMS尺寸效应的分析模型及应用[J]. 中国机械工程, 2004, 15(7): 632-635 |
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| 作者姓名： | 韩光平 刘凯 褚金奎 |
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| 作者单位： | 1. 西安理工大学机械与精密仪器学院,西安,710048;郑州航空工业管理学院工业工程系,郑州,450052
2. 西安理工大学机械与精密仪器学院,西安,710048 |
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| 基金项目： | 国家自然科学基金资助项目 (5 0 13 5 0 40 ) |
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| 摘 要： | 论述了尺寸效应的内涵及其对微电子机械系统(MEMS)基础理论研究的重要影响；提出了广义尺寸效应、狭义尺寸效应，正效应、负效应及其判据；建立了狭义尺寸效应的分析模型，从尺寸泛函的绝对值、相对值和对尺寸的灵敏度三个方面进行泛函分析。将该模型应用到两端固支多晶硅微梁的弯曲测试，分析结果与实验相符。
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| 关 键 词： | 微电子机械系统 尺寸效应 泛函分析 分析模型 |
| 文章编号： | 1004-132X(2004)07-0632-04 |
Analytical Model and Applications of Size Effect in MEMS |
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| Han Guangping , Liu Kai Chu Jinkui . Xi'an University of Technology,Xi'an,. Zhengzhou Institute of Aeronautical Industry Management,Zhengzhou. Analytical Model and Applications of Size Effect in MEMS[J]. China Mechanical Engineering, 2004, 15(7): 632-635 |
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| Authors: | Han Guangping Liu Kai Chu Jinkui . Xi'an University of Technology Xi'an . Zhengzhou Institute of Aeronautical Industry Management Zhengzhou |
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| Affiliation: | Han Guangping 1,2 Liu Kai 1 Chu Jinkui 11. Xi'an University of Technology,Xi'an,7100482. Zhengzhou Institute of Aeronautical Industry Management,Zhengzhou,450052 |
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| Abstract: | The connotations accompanied by the important influences on basic research of size effect in MEMS were investigated in both of broad and narrow senses, positive and negative size effects were presented as well as the criterion distinguishing the two effects. Analytical model of size effect in narrow sense is established, of which functional analysis is carried out in view of absolute value, relative value and sensitivity, finally, the model is applied to bending test of polysilicon micro-beams fixed on both ends with trapezoidal cross section, in a good agreement with the experiments. |
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| Keywords: | MEMS size effect functional analysis analytical model |
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