LTCC滤波器综述及制造工艺研究

首先简述了目前LTCC(Low Temperature Co-fired Ceramic,低温共烧陶瓷技术)滤波器的版图结构及其优劣,重点阐述了一种结构紧凑的600MHz低通滤波器的设计,及在这种滤波器制造过程中遇到的工艺难题及解决办法。该滤波器采用介电常数为7.8、损耗角正切为0.006的微波陶瓷材料,并用场路结合的方法完成其设计,整个器件的尺寸为5.1mm×3.3mm×1.6mm。运用矢量网络分析仪对加工出来的样品进行测试,通过测试数据可以看到,通带最大插入损耗为1.8dB,满足设计指标的要求。该滤波器尺寸小且具有良好的频率响应曲线,在小型化微波通信系统及雷达系统中有着广阔的应用前景。

The Summarization of LTCC Filter and the Research of Manufacture Process

Firstly a variety of layout structure of LTCC（Low Temperature Co-fired Ceramic） filter are introduced in this paper, then the advantage and disadvantage are analyzed in brief. Finally the process difficulties and the corresponding solution were presented which has been occurred during the manufacturing process. Emphasis is placed on the design of 600MHz low pass filter with compact size. The LTCC material is a dielectric constant erof 7.8 and a loss tangent of 0.006, the outline dimension of the filter is 5.1mm ~3.3mm~ 1.6mm. Furthermore, the filter is designed by the method of combine electromagnetism with circuit. The product sample was tested by using vector network analyzer, the results show that the maximum insertion loss in passband is 1,8 dB and match very well with the design reqirement. The filter has small size and excellent frequency property. It can be widely employed in compact microwave communication systems and radar systems.