| BST/LSCO异质结构的研究 |
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| 引用本文： | 段珂瑜,秦文峰,陶伯万,李言荣. BST/LSCO异质结构的研究[J]. 电子元件与材料, 2006, 25(5): 55-57 |
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| 作者姓名： | 段珂瑜 秦文峰 陶伯万 李言荣 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,四川,成都,610054;电子科技大学微电子与固体电子学院,四川,成都,610054;电子科技大学微电子与固体电子学院,四川,成都,610054;电子科技大学微电子与固体电子学院,四川,成都,610054 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 利用脉冲激光沉积法在STO(001)基片上外延生长了La0.5Sr0.5CoO3(LSCO)导电氧化物薄膜,研究了基片温度对LSCO薄膜结构和电性能的影响,并制备了Ni-Cr/BST/LSCO多层膜结构。XRD谱发现,沉积温度在450~700℃均能得到高度(00 l)取向的LSCO薄膜,LSCO(002)峰的半高峰宽FWHM=0.1°~0.2°;在LSCO薄膜上制备的BST介质膜具有良好的c轴取向和较高的表面平整度,其εr约为470,tgδ为0.036~0.060。
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| 关 键 词： | 无机非金属材料 La0.5Sr0.5CoO3 脉冲激光沉积法 外延生长 BST |
| 文章编号： | 1001-2028（2006）05-0055-03 |
| 收稿时间： | 2006-01-05 |
| 修稿时间： | 2006-01-05 |
Research on BST/LSCO Heterostructure |
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| DUAN Ke-yu,QIN Wen-feng,TAO Bo-wan,LI Yan-rong. Research on BST/LSCO Heterostructure[J]. Electronic Components & Materials, 2006, 25(5): 55-57 |
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| Authors: | DUAN Ke-yu QIN Wen-feng TAO Bo-wan LI Yan-rong |
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| Abstract: | Epitaxial growth of the conductive La0.5Sr0.5CoO3(LSCO) oxide thin films were realized on SrTiO3(001) substrates by pulsed laser deposition.Then the Ni-Cr/BST/LSCO multilayer films structures were prepared.The deposition temperature dependencies of the epitaxial growth and the electrical properties of these LSCO films were chiefly studied.XRD spectra confirmed that full epitaxial LSCO films can be grown for a wide deposition temperature range(450~700℃),in which the FWHM of LSCO(002) peak is 0.1°~0.2°.BST dielectric films deposited on the LSCO films has good c-axis orientation and smooth surface topography.The measured relative dielectric constant and the loss tangent of BST film is about 470 and 0.036~0.060,respectively. |
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| Keywords: | La0.5Sr0.5CoO3 BST |
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