An improved preparation method for cross‐sectional TEM specimens of films deposited on metallic substrates |
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| Authors: | Bingyang Ma Kaicheng Shi Hailong Shang Anming Zhang Rongbin Li Geyang Li |
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| Affiliation: | 1. State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, People's Republic of China;2. School of Mechanical Engineering, Shanghai Dianji University, Shanghai, People's Republic of China |
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| Abstract: | Cross‐sectional TEM analysis is one of the most important techniques to characterize microstructures of films. However, the complex process, low efficiency, and low success rate of specimen preparation limit its application. This paper analyzed the main causes of low success rate and proposed an improved method for specimen preparation of films deposited on metallic substrates. This method consisting of twin‐jet electropolishing and one‐sided rocking ion milling is high in efficiency and success rate. Microsc. Res. Tech. 79:276–279, 2016. © 2016 Wiley Periodicals, Inc. |
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| Keywords: | thin film TEM cross‐sectional specimen specimen preparation |
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