射频感应耦合等离子体模式转变的发射光谱

通过改变气体流率、放电气压和气体组成,研究射频感应耦合放电等离子体(inductively coupled plasma,ICP)在圆柱型放电装置中E模到H模的转化规律.采用发射光谱诊断法,对419.8 nm氩原子谱线和434.8 nm氩离子谱线进行采集和分析,以表征E模到H模的转换功率.当放电气压为60 Pa时,E-H转换功率最小;在Ar中加入He对E-H转换功率几乎没有影响,而加入N2后,E-H转换功率发生了明显的改变;随着氩气流率的增加,E-H转换功率在不断减小.结果表明:射频感应耦合放电等离子体E模到H模的转化是一个突然变化的过程,转换功率会因不同的气体流率、放电气压和气体组成而变化.

Mode Transition of RF Inductively Coupled Plasma by Emission Spectroscopy

The paper studied the conversion law of E mode to H mode in inductively coupled plasma (ICP) discharge device in a cylindrical discharge device, by changing the gas flow rate, discharge pressure and gas composition. An emission spectrum diagnosis method was adopted, and the 419.8 nm argon atomic spectrum and 434.8 nm argon ion spectrum were collected and analyzed to characterize the transition power of E to H mode. Results show that when the discharge pressure is 60 Pa, the transition power E-H is minimum;adding He in Ar does not affect the E-H transition power,and after adding N2, the E-H transition power has changed obviously. With the increase of the argon flow rate, the E-H transition power decreases. The conversion of E mode to H mode is a sudden change process in radio frequency inductively coupled plasma discharge. The transition power varies with different gas flow rates, discharge pressures and gas compositions.