Laser ablation and micromachining with ultrashort laser pulses |
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Authors: | Liu X Du D Mourou G |
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Affiliation: | Center for Ultrafast Optical Sci., Michigan Univ., Ann Arbor, MI; |
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Abstract: | The mechanisms of ultrashort-pulse laser ablation of materials are discussed, and the differences to that of long laser pulses are emphasized. Ultrashort laser pulses offer both high laser intensity and precise laser-induced breakdown threshold with reduced laser fluence. The ablation of materials with ultrashort pulses has a very limited heat-affected volume. The advantages of ultrashort laser pulses are applied in precision micromachining of various materials. Some femtosecond laser pulse micromachining results, including comparison with long pulses, are presented. Ultrashort-pulse laser micromachining may have a wide range of applications where micrometer and submicrometer feature sizes are required |
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