Medical displays by using plasma‐beam‐alignment technology |
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| Authors: | Chin‐Yang Lee Chi‐Hung Liu Chih‐Wei Chen Saodo Miki Huang‐Ming Philip Chen Shermann Lin Po‐Hua Su Chein‐Dhau Lee |
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| Affiliation: | 1. Industrial Technology Research Institute, Plasma Science and Technology, Rm. 144, Bldg. 11, 195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu, 310 Taiwan, ROC;2. Science and Technology of Kyoto Institute of Technology, Kyoto, Japan;3. Department of Photonics and Display Institute, National Chiao Tung University, Hsinchu, Taiwan, ROC;4. Chi Mei Optoelectronics, No. 3, Sec. 1, Hsinchu, Taiwan, ROC |
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| Abstract: | Abstract— Novel anode layer plasma within minimum chamber space was developed for non‐contact alignment process. The plasma‐treated polyimide (PI) surface showed no particle contamination and no micro‐scratches. Surface morphology was investigated by using scanning electron microscope (SEM), an atomic force microscope (AFM), and X‐ray photoemission spectroscopy. The different oxygen‐to‐carbon ratio (O]/C] ratio) for XPS spectra indicated a composition change after plasma treatment. Surface pretilt angles were varied from 0 to 2.1° under different plasma exposure times. Finally, a prototype 20.8‐in. QXGA IPS‐mode gray‐scale medical liquid‐crystal display was successfully demonstrated with high contrast ratio, excellent uniformity, and wide viewing angle using this new plasma‐beam‐alignment technique. |
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| Keywords: | Liquid‐crystal alignment polyimide anode layer plasma plasma beam alignment |
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