扫描探针显微镜的进展

扫描探针显微镜（SPMs）经过近30年的发展，已经应用到科学研究的各个方面。为适应不同研究的需要，扫描探针显微镜本身的发展也非常迅速。如其中原子力显微镜（AFM）从发明初期的单一的接触工作模式发展到包括可以测量粘弹性的相位模式在内的多种工作模式，同时通用型方面也高度发展，已经形成了一个庞大的高度自动化的扫描探针显微镜的家族。在这个家族中，严格环境控制的扫描探针显微镜的出现，很好的解决了各种务件下对样品的原位观察，环控化扫描探针显微镜的发展已经引起了人们的足够重视，必将成为扫描探针显微镜发展的一个重要方向。新近出现的各种显微镜集成的扫描探针显微镜系列是这个家族中的新成员，这个成员可以同时完成大范围、高分辨和精确定位等各种研究，必将在半导体制造厂的异物检查、金属和绝缘体等表面测定以及生物大分子研究等领域发挥重要作用。扫描探针显微镜的发明和发展促进了一门新兴的高科技——一纳米科学技术的诞生，宣告一个科枝新纪元，纳米科技时代已经来临。

The Advance of Scanning Probe Microscope

Scanning probe microscopes (SPM) have been developing for nearly 30 years, which are applied into various aspects of science. SPM, which will satisfy different research develops rapidly from the single contact mode at the early period to multimode including phase image mode that can measure the sample viscoelasticity. And a big and highly automatic scanning probe microscope family comes into being. In this family, a highly environment-controlled SPM has landed into SPM market, which satisfies various observations in situ. More and more attentions have been attracted to environment-controlled SPM. It will be an important development trend of SPM. As an important new member, another highly compositive SPM , which will be play an important role in eyewinker checking, surface measurement of metals and insulators and the research of bio-macromolecules and etc can complete wide scanning, high resolution, precise re-location and other studies. The invention and development of SPM which declared, an epoch, the era of Nano Science and Technology is coming. promoted a new high- tech---Nano Science and Technology.