微晶玻璃超光滑表面残余应力的对比分析研究

通过对微晶玻璃、陶瓷、金属3个试件进行超精密加工,使试件表面粗糙度值达到纳米级,采用非破坏性的X射线衍射sin2ψ法测量原理对不同试件的残余应力进行了测试研究。结果表明：在试验条件下,3个试件都只存在残余压应力,并且陶瓷的残余压应力最大,金属残余压应力最小。超光滑表面残余应力的研究对提高表面完整性,改善加工工艺具有重要的意义。

Residual Stress Analysis of Glass-ceramic Super Smooth Surface

The residual stress on the precision machining surface of glass-ceramic, ceramic and metal was measured by using X-ray diffraction method. The roughness of super precision machining surface reached nanometer level. In this study, the results showed that the residual stress of three workpiece was compressive, and the ceramic residual stress is the largest, the one of the metal is the smallest. The analysis on the residual stress is significant to enhance the surface integrity and the processing technic.