| 微机械产品的应用及其微细加工方法的分析研究 |
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| 引用本文： | 姜涛,梁迎春,赵岩.微机械产品的应用及其微细加工方法的分析研究[J].制造技术与机床,2007(10):9-13. |
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| 作者姓名： | 姜涛 梁迎春 赵岩 |
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| 作者单位： | 哈尔滨工业大学机电学院,黑龙江,哈尔滨,150001 |
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| 摘 要： | 综述了国内外微机械产品在军事、医疗、航空航天等各领域应用的最新进展；分析了微细切削加工、LIGA技术、准LIGA技术、刻蚀技术及微细特种加工的工艺原理及特点。最后对微机械产品及其加工方法的新前景进行了展望。
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| 关 键 词： | 微细加工 准LIGA技术 微机电系统 |
| 修稿时间： | 2007-05-22 |
Application of Micro-machine Productions and Development of Micro-machining Methods |
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| JIANG Tao,LIANG Yingchun,ZHAO Yan.Application of Micro-machine Productions and Development of Micro-machining Methods[J].Manufacturing Technology & Machine Tool,2007(10):9-13. |
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| Authors: | JIANG Tao LIANG Yingchun ZHAO Yan |
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| Affiliation: | School of Mechatronie Engineering, Harbin Institute of Technology, Harbin 150001, CHN |
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| Abstract: | This paper aims at presenting the state - of - the - art of miniature components in various fields, such as military, medicine and aerospace. The mechanisms of micro - manufacturing technology, for example, micro cutting, LIGA, quasi - LIGA, etching and micro non - traditional machining, are presented. Fi nally, some comments on future needs and directions are also offered. |
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| Keywords: | Micro - machining Quasi - LIGA Technology MEMS |
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