Magnetic anisotropy of perpendicular media on grooved structuresubstrate

Magnetic anisotropies were investigated for CoCr perpendicular magnetic films on grooved structure substrates (pitch length 2.1 μm) prepared by CF₄-reactive-ion etching. Perpendicular magnetic anisotropy decreases in the region where groove depth GD >650 A. The reduction is due to the inclination of the crystal growth axis on the groove surface. In-plane magnetic anisotropy, K_u∥, strongly depends on GD and saturation magnetization M_s. In a region of large GD and large M_s, Ku_∥ is mainly due to shape anisotropy. In a region of small GD and small M_s , K_u∥ is caused by perpendicular magnetic anisotropy, in addition to shape and magnetorestrictive anisotropy