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一种新型差动式压电加速度传感器
引用本文:刘俊,秦岚,刘京诚,李敏. 一种新型差动式压电加速度传感器[J]. 光学精密工程, 2007, 15(6): 903-909
作者姓名:刘俊  秦岚  刘京诚  李敏
作者单位:重庆大学,光电工程学院,光电技术及系统教育部重点实验室,重庆,400044;重庆大学,光电工程学院,光电技术及系统教育部重点实验室,重庆,400044;重庆大学,光电工程学院,光电技术及系统教育部重点实验室,重庆,400044;重庆大学,光电工程学院,光电技术及系统教育部重点实验室,重庆,400044
摘    要:设计了一种新型的差动式压电加速度传感器。介绍了传感器的结构和工作原理,推导了传感器的数学模型,并分析了传感器惯性质量块和压电元件的质量对其输出特性的影响。然后,分析了传感器处理电路的结构,推导了该电路的设计指标。实验结果表明,该传感器采用单个惯性质量块实现了对加速度信号的差动式测量,其结构简单、重量轻、易于加工制造、抗干扰能力强;线性度为0.1%,是普通加速度计的1/2;频率响应误差为1%;重复性为1.27%;测量灵敏度是普通加速度计的2倍,基本达到了设计的目的。

关 键 词:压电传感器  加速度传感器  差动
文章编号:1004-924X(2007)06-0903-07
收稿时间:2006-09-26
修稿时间:2006-09-262007-01-07

A novel differential piezoelectric accelerating sensor
LIU Jun,QIN Lan,LIU Jing-cheng,LI Min. A novel differential piezoelectric accelerating sensor[J]. Optics and Precision Engineering, 2007, 15(6): 903-909
Authors:LIU Jun  QIN Lan  LIU Jing-cheng  LI Min
Affiliation:Key Laboratory of Optoelectronic Technology ~ Systems, the Ministry of Education, Chongqing 400044, China
Abstract:A novel differential piezoelectric acceleration sensor was introduced.The sensor's structure and operating principle were presented and its mathematic model was established,then the relationship between the sensor's output characteristic and inertial mass and the piezoelectric components was discussed.Finally,the process circuit structure of sensor and its characteristic were discussed also.Experimental results show that the sensor with one inertial mass can realize the differential measurement of acceleration signals, and it has advantages in simple structure,light weight,simple for working and manufacturing,and better anti-interference ability.Its linearity is up to 0.1%,which is half of common accelerometer.It has satisfied the design purpose in frequency response error of 1% and repeatability of 1.27%,and its measurement sensitivity is twice of general accelerometer.
Keywords:piezoelectric   sensor   acceleration sensor   differential
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