MOEMS tuning element for a Littrow external cavity laser

A miniature grating-tunable external cavity laser diode constructed using microoptoelectromechanical systems (MOEMS) technology is described. The tuning element is a vertically etched blazed grating mounted on a compound flexure, which consists of a cantilever in series with a portal frame. The flexure is deflected using comb electrostatic drives to rotate and translate the grating. The tuning element is prototyped using deep reactive ion etching of bonded silicon-on-insulator (SOI) material. Interferometric measurements of electromechanical performance are presented, and departures from the ideal behavior are identified. Electrostatic tuning of a Littrow external cavity laser over a range of 20 nm using a 50-V drive is demonstrated.