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New graphite liquid metal ion source geometry developed for corrosive metal. Application to an aluminium ion source |
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| Authors: | J Gierak G Ben Assayag |
| Affiliation: | a Laboratoire de Microstructures et Microélectronique - CNRS 196 avenue Henri Ravera - BP 107 92225 -, Bagneux Cedex -, France b Centre d'Elaboration de Matériaux et d'Etudes Structurales - CNRS 29 rue jeanne Marvig. BP 4347 31055-, Toulouse Cedex -, France |
| Abstract: | In this work we present a new patented graphite-based ion source geometry for corrosive metals, where the tip itself is the heating element. A specific treatment is applied to improve the wetability of the graphite surface. In the case of an Aluminium beam, experimental test results are presented concerning FIB micromachining, ion microscopy and FIB localised implantation. |
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