| 一种新型三自由度微定位新方法 |
| |
| 引用本文： | 万佩,秦岚,薛联,段莹.一种新型三自由度微定位新方法[J].国外电子测量技术,2011,30(7):31-33. |
| |
| 作者姓名： | 万佩 秦岚 薛联 段莹 |
| |
| 作者单位： | 重庆大学光电工程学院,重庆,400044 |
| |
| 摘 要： | 设计了一种基于压电陶瓷的三维微定位系统,通过12个空间分布的压电陶瓷微驱动器及4个工作平台的配合,实现X、Y、Z向的精密位姿控制.阐述了微定位原理、建立了载物台位姿与压电陶瓷微驱动器伸缩量之间的关系,介绍了系统误差来源以及微定位装置的构造.该研究可望为一些高科技领域的微进给提供实用新技术.
|
| 关 键 词： | 压电陶瓷 空间定位 微位移 |
New technique of three DOF precision positioning |
| |
| Wan Pei,Qin Lan,Xue Lian,Duan Ying.New technique of three DOF precision positioning[J].Foreign Electronic Measurement Technology,2011,30(7):31-33. |
| |
| Authors: | Wan Pei Qin Lan Xue Lian Duan Ying |
| |
| Affiliation: | Wan Pei Qin Lan Xue Lian Duan Ying(College of Optoelectronic Engineering,Chongqing University,Chongqing 400044,China) |
| |
| Abstract: | A micro positioning system based on piezoelectric ceramics is proposed,which can realize x,y,z DOF precision positioning by 12 PZT actuators and 4 worktables.The micro positioning principle is given,and the relationship between the position of platforms and the displacement of PZT actuators are shown,and the error source,and the conformation of the device are introduced.It provides practical new technique for high-tech field such as micro feed motion. |
| |
| Keywords: | piezoelectric ceramic space positioning micro movement |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
